Both instruments are Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high- and low-voltage ultra-high resolution capabilities with an electrostatic lens design together with a low vacuum mode for charge compensation on non-conductive material. The instrument features unique in-lens detection and beam deceleration offering unprecedented contrast and versatility to researchers working with a variety of materials and devices ranging from beam-sensitive soft matter to bulk magnetic samples, even at long (>10 mm) working distances.
The instruments are equipped with the twinned system for Energy Dispersive X-Ray Spectroscopy (EDS): the ChemiSEM and the Pathfinder. The Analytical HR SEM Apreo is also equipped with the SPARC (Delmic) system for Cathodoluminescent Spectroscopy and Imaging (CL) and the Apollo (EDAX) system for Electron Back-Scattered Diffraction (EBSD). The CryoSEM Apreo is equipped with the system PP3010 (Quorum) permitting fast cooling of samples, their fracture, coating and SEM imaging at the cryogenic temperature.
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